Combined 3-D X-Ray microtomograph and
microbeam fluorescence system

   Computer-aided tomography (µCAT) systems are configured to take many views of the object in order to build a 3-D model of its internal structure. 2-D slices through this volume can be viewed as images, or the 3-D volume may be rendered, sliced, and measured directly. For the NDT inspection of miniaturised samples the microtomography analysis is guaranteed for feature recognition down to a few tens of microns. 3-D tomographic reconstructions are obtained by a proprietary highly optimized computer code based on a modified Feldkamp algorithm.

   The microbeam fluorescence (µXRF) component is a configurable film thickness and composition measuring tool. It includes mechanical or optical X-ray beam collimation options, Amptek PIN diode X-ray detector and analysis software, motorized micrometric x-y-z stage for accurate sample positioning. A visual image of the sample is synchronized with the µXRF scanning in order to pinpoint measurement location, as well as for historical documentation.

The XRF analysis with Fundamental Parameters converts elemental peak intensities to elemental concentrations and/or film thicknesses.

Application area of the product

X-ray-tomography as an NDT tool can provide information on:
• volumetric density variations
• visualization of micro-cracks, voids, inclusions
• pore network connectivity in porous materials
• microstructure integrity of various components
• accurate geometrical measurements in 3-D

The (µXRF) system provides high resolution composition mapping and accurate thickness measurements of multilayer samples. The main area of application are microelectronics, oil industry (sulphur content) , geology.